
UFYԴ^(gu)еؓճmϵyDZa(chn)h(hun)坍o˽Ѓr(ji)ֵۉmM(mn)h(hun)ŷҪP(gun)IOԭ**L(fng)Ca(chn)ؓգڷۉma(chn)Դ^]gγɶm՚ܵϵy(jng)^(gu)Ч՚ѭh(hun)ۉmռ̎
ԓϵy͵Ḷ́
1. ۉma(chn)cԴ^ƣ
ڏUF̎ĸ(g)˺xݔϵȣ(hu )a(chn)ٷۉmF\Uȣws|(zh)
P(gun)Ic(din)ϵyOӋȏ{**Դ^ڷۉma(chn)c(din)Oã
]/]֣ M܌a(chn)ۉmO^CϿϿƤݔ͙CDc(din)(dng)Y](li)ƷۉmUɢ
ֲm/mڣڟo(w)ȫ]ą^˹λOzڸOOӋm֣lp֣ΠСλúL(fng)ٶ_Чwɢķۉmm֑MmԴ
2. ؓcܵݔͣ
ϵyĵxL(fng)CͨL(fng)ĥͣm\DcBӵ**mܵW(wng)j(lu )**Юa(chn)**ؓգ
@ؓͨ^(gu)֧ܵf(g)m/m
ؓm՚ⱻm/m
m՚ͨ^(gu)֧ܵRL(fng)ݔ͵mCܵOӋ迼]L(fng)٣ֹۉmeͨ15-25 m/s^Ƕȣpĥԣٷۉmĥpԏ
3. ༉̎
mM(jn)mCM(jn)ж༉
Ax/ (x)һЩwwۉmM(jn)^(gu)VԪǰOóһL(fng)xM(jn)гxpp^(gu)VԪؓ
^(gu)VԪ
VͲm (*Ҋ(jin)) mͨ^(gu)ֱˮƽbĸЧVͲ渲PTFEĤͿӵĞVģۉmڞVͲ՚^(gu)VM(jn)VͲȲ?j)VͲ^(gu)VeЧʸߣ_99.99%ϣЧõc(din)dzm̎ٷۉm
Vmԭ(li)ƞVͲʹò^(gu)Vض(chng)ҲБ
ʽm (^Ҋ(jin)ض(chng)) ˮFˮԡۉmmͬr(sh)Ҫػ̎ճԷۉmr(hu )a(chn)ˮ̎
Ч^(gu)V (HEPA/ULPA) (xژOҪո߃r(ji)ֵۉm)^(gu)VӸЧЧ^(gu)V_ųĿ՚_O˜
4. ϵy
S(zh)VͲ/Vۉmϵy(hu )ҪԾSϵyЧʺL(fng)
Ҫҷʽ
}_ңãs՚ͨ^(gu)}_y˲gćϵć쇊VͲ/VȲγɷ͛_ʹ(zh)ڞVķۉmӳƬÓ·ĻҶ^(gu)Ԅ(dng)ƣr(sh)
ҕr(sh)ϵyͨҪͣCھ(xin)ң
5. ۉmռc̎
(li)ķۉmԼAx(li)ķۉmmC·ĻҶ
ҶOӋλӋOطۉm
ۉmͨ^(gu)Ҷײжbų
Dжy/ж*BmgЪжֻܱҶֹܷ©L(fng)Ɖؓ
y+ݔ͙C/ΰݔ͙C Ҫۉmݔ͵hc(din)Ĉ(chng)
ռķۉmҪǽٷĩɣ
ãԭϷұ̣늠t䓣н(jng)r(ji)ֵ
ȫ̎ã ںкs|(zh)ؽ٣ķۉm谴ΣUUҎ̎
6. ՚ŷ/ѭh(hun)
(jng)^(gu)Vĝ՚ͨ^(gu)L(fng)CijmCăų
ŷţͨ^(gu)ŚͲ裩ŚͲ߶ȺŷŝM(mn)㮔حh(hun)ҎҪͨbھ(xin)OyO䣨CEMS(sh)r(sh)OŷŔ
ѭh(hun) (x)ں^鹝Ɍֻȫ?j)Ŀ՚ͻ?ch)g_՚|(zh)_ˣp܇(ch)gůܺĺL(fng)a
7. ȫcϵy
OӋ ٷۉmбըϵyйƬy̽ycϨboOӋӵo늞Vģ軯bãx M(mn)ATEXNFPAȷ˜
OӋOyضOܻԚwoӿ
Oϵy PLC/DCSϵyOL(fng)C\РB(ti)ϵyc(din)yT(mn)B(ti)λضŷŝȵP(gun)I(sh)FԄ(dng)\ψ(lin)io牺^(gu)߈ߜͣC
׃lƣL(fng)C׃l(dng)(sh)Hۉma(chn)ܵ{L(fng)(sh)F\